Laboratory of material characterization of micro- and nanostructures (MCMN Lab) - Faculty of Electronics and Information Technology, WUT
The MCMN Lab was established in 2010 and provides equipment for comprehensive surface and bulk characterization of physical and chemical properties of materials as well as micro- and nanoscale structures. The up-to-date instrumentation enables the performance of observations and analyses of test samples surface morphology (e.g. topography, structure) as well as their surface and bulk chemical composition.
The facility allows to investigate important features of classic and advanced materials (semiconductors, insulators, metals) already applied or considered to be prospective for applications in electronics, particularly in electronic devices like micro-, nanoelectronic and photonic structures or hybrid microsystems as well as MEMS and MOEMS structures.
MCMN Lab instrumentation:
1. Experimental atomic force microscope (AFM) “DROBNOWIDZ 1” enabling investigation and imaging of specimen surface morphology in contact and shear force modes. Resolution: vertical (z) – few nm; horizontal (x-y plane) – < 50 nm.
The option of extending instrument functionality to tapping mode as well as investigating electrical properties of specimen surfaces.
2. Surface profiler “Dektak 150” VEECO enabling measurements of surface profiles (and thus surface morphology) along any chosen direction. Resolution: vertical (z) – few nm; horizontal (x-y plane) – 1 mm.
3. Scanning Electron Microscope (SEM) „S-3400N” HITACHI enabling imaging of surface topography and structure. Magnification: 5x – 300 000x. Resolution: sub-micron. Possibility to obtain oblique images. No need for specimen preparation. Possibility to analyze elemental composition of sample surfaces using Energy Dispersive X-ray Spectrometry (EDS).
4. Confocal laser scanning microscope “LEXT OLS3100” OLYMPUS enabling 2D and 3D specimen imaging. Magnification: 120x – 14 400x. Resolution: vertical (z) – 10 nm; horizontal (x-y plane) – 100 nm.
5. Secondary Ion Mass Spectroscope (SIMS) MILLBROOK MiniSIMS enabling performing specimen chemical composition analyses in static, mapping and dynamic (etching and depth profiling) modes. Resolution (focus spot): conductive samples < 10 mm; nonconductive samples < 50 mm.
6. High-frequency (10 MHz – 13,5 GHz) network analyzer “N4395A” AGILENT TECHNOLOGIES used to determine electrophysical parameters of electronic materials in the radio (RF) and microwave (MW) spectrum range of electromagnetic waves.
The laboratory is located in the Radioengineering building, entrance A, room 421.
Head of the laboratory: Aleksander Werbowy, Ph. D.; e-mail: werbowy@imio.pw.edu.pl
Vice-head: Piotr Firek, Ph.D.; e-mail: pfirek@elka.pw.edu.pl
